JPH0416424Y2 - - Google Patents

Info

Publication number
JPH0416424Y2
JPH0416424Y2 JP1985127974U JP12797485U JPH0416424Y2 JP H0416424 Y2 JPH0416424 Y2 JP H0416424Y2 JP 1985127974 U JP1985127974 U JP 1985127974U JP 12797485 U JP12797485 U JP 12797485U JP H0416424 Y2 JPH0416424 Y2 JP H0416424Y2
Authority
JP
Japan
Prior art keywords
wafer
exposure
light
intensity
reduction projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985127974U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6236532U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985127974U priority Critical patent/JPH0416424Y2/ja
Publication of JPS6236532U publication Critical patent/JPS6236532U/ja
Application granted granted Critical
Publication of JPH0416424Y2 publication Critical patent/JPH0416424Y2/ja
Expired legal-status Critical Current

Links

JP1985127974U 1985-08-20 1985-08-20 Expired JPH0416424Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985127974U JPH0416424Y2 (en]) 1985-08-20 1985-08-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985127974U JPH0416424Y2 (en]) 1985-08-20 1985-08-20

Publications (2)

Publication Number Publication Date
JPS6236532U JPS6236532U (en]) 1987-03-04
JPH0416424Y2 true JPH0416424Y2 (en]) 1992-04-13

Family

ID=31023222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985127974U Expired JPH0416424Y2 (en]) 1985-08-20 1985-08-20

Country Status (1)

Country Link
JP (1) JPH0416424Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5068066A (en]) * 1973-10-17 1975-06-07
JPS60177623A (ja) * 1984-02-24 1985-09-11 Hitachi Ltd 露光装置

Also Published As

Publication number Publication date
JPS6236532U (en]) 1987-03-04

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